[mems-talk] Effect of EDP/KOH on PDMS andphotopatternable silicone

[Roger Shile]

I wonder if a PDMS bond between two wafers will withstand a KOH etch, or
will the interface fail?

Roger Shile

-----Original Message-----
KOH doesn't affect PDMS
Shay
-----Original Message-----

Hello,

I wanted to know if anyone of you has an experience with performing  
EDP/KOH etch of a Si wafer with PDMS or photopatternable silicone WL  
5150 patterned on the back side. Does the EDP/KOH etch damage the PDMS  
or the photopatternable silicone?

Thank you very much,

Anurag Tripathi