[mems-talk] Etchant for Aluminum oxide

[seyeda at ualberta.ca]

Hi all,
I was wondering if anyone knows a good etchant for Aluminum Oxide.
My process is as follows:
1- Deposit Aluminum Oxide on Silicon Wafers using sputtering or evaporation
2- Spin 1~1.3 u HRP-504 on Si+AlOx wafer( on top of AlOx layer)
3-UV expose and Develope to produce the desired patterns on the  
resist(HRP-504)
4-Etching ????? I don't know what etchant I can use to etch AlOx. It  
should be something that doesn't eat up Silicon or HRP 504. and only  
works on Aluminum Oxide.
Thank you for your comments.

Seyed