[mems-talk] Gold Etchant with selectivity over Mo

Chong Xie dogdoe at gmail.com
Mon Jul 21 14:31:43 EDT 2008


Hello everyone,

I am looking for some etchant that can etch away Au and leave Mo. I tried
KI/I2, but it seems it etched Mo as well. 

Any input is appreciated, and thanks in advance.

-- 
Chong Xie
Ph. D Candidate
Cui Group
The Geballe Laboratory for Advanced Materials
476 Lomita Mall, Stanford University
Stanford, CA 94305



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