[mems-talk] Gold Etchant with selectivity over Mo

Moshe moduli0621 at yahoo.com
Wed Jul 23 01:55:44 EDT 2008


I know that Aqua Regia may etch gold but I don't know what it influence on the Mo.
Aqua regia composition : 25% concentration  HNO3 + 75% concentration    HCl
It is very corrosive solution, please be careful!


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