[mems-talk] Gold Etchant with selectivity over Mo

[Kevin Paul Nichols]

Aqua Regia will also etch Mo. You'll be left with a thin film of transparent
MoO3.

- Kevin

Kevin Paul Nichols
MESA+ Institute for Nanotechnology
Mesoscale Chemical Systems
Meander 151
University of Twente
Postbus 217
7500 AE Enschede
The Netherlands

Office: +31 (0)53 489 26 31
Mobile: +31 (0)6 49 312 471
Fax   : +31 (0)53 489 35 95
Email : k.p.nichols at utwente.nl
Web   : http://mcs.tnw.utwente.nl/

> From: Moshe <moduli0621 at yahoo.com>
> Reply-To: General MEMS discussion <mems-talk at memsnet.org>
> Date: Tue, 22 Jul 2008 22:55:44 -0700 (PDT)
> To: <mems-talk at memsnet.org>
> Subject: Re: [mems-talk] Gold Etchant with selectivity over Mo
> 
> I know that Aqua Regia may etch gold but I don't know what it influence on the
> Mo.
> Aqua regia composition : 25% concentration  HNO3 + 75% concentration    HCl
> It is very corrosive solution, please be careful!