[mems-talk] Pellicle life

Muk Mei Yu ahyao_mymuk at yahoo.com
Sat Jul 26 01:26:20 EDT 2008


Hi,

I'm using pellicle on PE mask plate and suffering high pellicle breakages. Let's set aside handling issue, does anyone know what are the factors that can affect pellicle life? 

Thanks,
Muk
      


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