[mems-talk] Si Etch Initiation Failure

[Muk Mei Yu]

Hi,

Sorry to mention that I've incorporated 'oxide etching' prior to Si etch in my
process, but yet I still encounter etch initiation failure. 

I also tried to increase temperature from 75C to 85C, but no improvement. 

How does sonication help to promote Si etching? There is agitation during my etching process, is the effect as good as sonication?

Thanks,
Muk