[mems-talk] Database for photoresist

[pradeep # sharma]

Dear Friends,

Please tell me some source for chemical/physical/electrical properties of photoresist like AZ, SP and SU-8.

I would like to know the electrical breakdown voltage of AZ, SP and SU-8 types of resist.  

You may forward a PDF or internet link. 

Thanks to all. 


with love and best wishes,
Pradeep Sharma, 

Laboratory NB 02, 
IAMS, Academia Sinica, 
P.O. Box: 23-166,
Taipei-106, Taiwan, R.O.C.

Phone Number: 00886-2-2362-4901 (Laboratory)
              00886-910984500 (Mobile)