[mems-talk] Photolithography on Mica and Teflon sheets

[madhav rao]

Hi All,

      I wanted to do photolithography process to
pattern on teflon and mica sheets. Does any one has
any experience on this. I would like to use positive
resist, so can any one suggest me what resist and
developer I need to use. Does Shipley 1818 will work
for teflon and Mica ?
Let me know.

Thanks

Regards,
Madhav Rao
Graduate student ,
University of Alabama,
Tuscaloosa.