[mems-talk] 20um features using AZP4620

[李加东]

you can use spray coating
 
在2008-06-04，"Haixin Zhu" <Haixin.Zhu at asu.edu> 写道：
>Dear all,
>
>I am trying to produce 20um features using AZP4620, the thickness is
>required to be 38um, I tried double coating/triple coating with various
>spin speed and baking condition, and they did not work. Is there any one
>having this experience and advise me on the right direction?