[mems-talk] 20um features using AZP4620

[Haixin Zhu]

We can have the desired thickness, but after the developping(the developping time is longer than 10mins), the 10um feature is gone and other bigger feature get little distorted. I believe there are something wrong with the baking and exposure, but not very clear which one need to be fine-adjusted or corrected.

Any comments

Michael 

-----Original Message-----
From: mems-talk-bounces at memsnet.org [mailto:mems-talk-bounces at memsnet.org] On Behalf Of 李加东
Sent: 2008年6月3日 17:10
To: mems-talk at memsnet.org
Subject: Re: [mems-talk] 20um features using AZP4620

you can use spray coating