[mems-talk] 20um features using AZP4620

[Tolga YELBOGA]

Hi;
Should you use only AZ4620 ?
I used AZ9260 positive resist before and 33 um thickness was obtained by
multiple coating. And profile of the resist rather perpendicular. I think
you can use AZ9260..
Regards.


Tolga YELBOGA 
Project Engineer
Nanotechnology Researh Center 
Bilkent University 
Bilkent, Ankara 06800 TURKEY 
Voice: 90-312-290-1020 
http://www.nanointurkey.com
http://www.nanotam.bilkent.edu.tr

-----Original Message-----
From: Haixin Zhu [mailto:Haixin.Zhu at asu.edu] 
Sent: Tuesday, June 03, 2008 11:26 PM
To: General MEMS discussion
Subject: [mems-talk] 20um features using AZP4620

Dear all,

I am trying to produce 20um features using AZP4620, the thickness is
required to be 38um, I tried double coating/triple coating with various
spin speed and baking condition, and they did not work. Is there any one
having this experience and advise me on the right direction?

Appreciate the help

Michael