[mems-talk] 20um features using AZP4620

[Haixin Zhu]

Thanks Tolga,
 
I heard AZ 9260 is more transparent than AZ 4620 which may help with the fully UV exposure, but never used it before. Would u suggest on the processing recipe including spin-speed, soft baking temp/time, exposure dose, developing time and hard bake tempe/time for >30um film,
 
appreciate your help
 
Michael 
 

________________________________

From: mems-talk-bounces at memsnet.org on behalf of Tolga YELBOGA
Sent: Wed 6/4/2008 1:17 PM
To: 'General MEMS discussion'
Subject: Re: [mems-talk] 20um features using AZP4620

Hi;
Should you use only AZ4620 ?
I used AZ9260 positive resist before and 33 um thickness was obtained by
multiple coating. And profile of the resist rather perpendicular. I think
you can use AZ9260..