[mems-talk] Wet release tool for MEMS

Du Bois Bert duboisb at imec.be
Fri Jun 13 05:06:54 EDT 2008


Dear,

I am looking for a wet release tool (mainly for HF) before going to the
superctitical CO2 dryer.
So in the tool, I would be able to etch with HF, rinse with H2O and IPA
without that the wafer goes out of the liquid during the whole process. 
Does anybody has any idea where I can find a tool like this?

Regards,
Bert Du Bois 


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