[mems-talk] 20um features using AZP4620

[Tolga YELBOGA]

Hi;
You can not obtain 65 um thick resist using single coating by  AZ 9260. You have to coat multiple.

Tolga YELBOGA 
Project Engineer
Nanotechnology Researh Center 
Bilkent University 
Bilkent, Ankara 06800 TURKEY 
Voice: 90-312-290-1020 
http://www.nanointurkey.com
http://www.nanotam.bilkent.edu.tr

-----Original Message-----
From: Haixin Zhu [mailto:Haixin.Zhu at asu.edu] 
Sent: Friday, June 13, 2008 11:43 PM
To: General MEMS discussion
Subject: Re: [mems-talk] 20um features using AZP4620

Dear Chad,

U are right. Though I succeeded in making 38um thick pattern with 20um feature size, there is still some problem with undercut of the pattern and bottom residue. I will try AZ 9260, and hoping you can send me your processing traveler so I can use as reference and start point.

Thanks

Michael