[mems-talk] MEMS dicing issue

[Terry Zhu]

I am looking for a UV sensitive double side tape for dicing. The tape
has to be attached to a glass wafer before attaching to the MEMS wafer.
SO UV light will be going through a glass wafer to reach the tape. Any
one can recommend a tape and/or a supplier? I tried a single side tape 
but had problem peeling it out without damaging the moving part. Thanks.

Terry