[mems-talk] Ohmic contact

[xudehui0108]

Moshe
    It depend on the wafer's doping concentration.If the doping concentration is high,you can get ohmic contact;otherwise,it's hard to get ohmic contact.
    I usually use Al to get ohmic contact.Process is as follow:
   1)Deposition Al
   2)Lithograhy
   3)Etch Al
   4)Remove PR
   5)Alloying


2008-06-18 

xudehui0108 

发件人： Moshe 
发送时间： 2008-06-17  20:37:23 
收件人： General MEMS discussion 
抄送： 
主题： [mems-talk] Ohmic contact 
 
Hello !
How I can get ohmic contact?
I talk about N type silicon with antimony contamination.
What the optimal metal and the process  to get ohmic contact between the metal and the silicon   ?

Thank You