[mems-talk] protocol for octadecyltrichlorosilane (OTS)

Barbara Cortese KORTESEB at libero.it
Fri Jun 20 07:14:02 EDT 2008


Hi all

I'm trying to sylanize Su8 with octadecyltrichlorosilane (OTS), but I'm finding some problems like a powdery residual, or PDMS attachment.
Does anyone know a protocol to use OTS? If so can you please share it?

Thanks 
Barbara



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