[mems-talk] Glass to Kovar anodic bonding

Andrea Mazzolari mazzolari at fe.infn.it
Fri Jun 20 17:43:24 EDT 2008


Hi all,
from my knowledge, silicon is slowly etched by HF. Is this information
correct ? Which is the etch rate ?
Many thanks,
Andrea

> Is any body doing glass to Kovar anodic bonding?
>
> if yes, can I get some more information about the same..
>
> --
> Ashwini Jambhalikar


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