[mems-talk] Glass to Kovar anodic bonding

[shay kaplan]

Andrea
HF doesn't react with Silicon. However, once native oxide forms on the
Silicon, it will be etched off. I would guess ~15A per hour but I don't know
this for sure.
Shay

-----Original Message-----
From: mems-talk-bounces at memsnet.org [mailto:mems-talk-bounces at memsnet.org]
On Behalf Of Andrea Mazzolari
Sent: Saturday, June 21, 2008 12:43 AM
To: General MEMS discussion
Subject: Re: [mems-talk] Glass to Kovar anodic bonding

Hi all,
from my knowledge, silicon is slowly etched by HF. Is this information
correct ? Which is the etch rate ?
Many thanks,
Andrea