[mems-talk] low viscosity and thermal(<130C)/UV curable dielectric materail

Bong Hwan KIM sedra132 at gmail.com
Sat Jun 21 12:32:27 EDT 2008

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Hi all

I have been studying on dielectric materials for membrane. Can anyone
recommend dielectrics for me?
Thickness : 1~2um, Low viscosity < 50 cst, thermal cure temp < 130C,
resistance to chemical(acetone, IPA, methanol, PR developer & remover, Au &
Al etchant),

Charles

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