[mems-talk] A method to design and calculate the parameters of a mechanical normally-closed microvalve with electrostatic actuation

[Denis Petrov]

Hello,

I am looking for a good literature (or any other) source on the method for
the calculation of microvalve parameters (geometry, flow rates etc.).
I have been searching for a long time, but what I see is mostly theoretical
descriptions of main microfluidic interelations.
I need a method, an approach.

Does anybody know something on the topic? Or possibly has some expirience
with such (or similar) a design task?

Thank you!

Regards,

-- 
M.Sc. Denis Petrov
Ph.D. Student

Institute for Microsensors, -actuators and –systems (IMSAS)
University of Bremen, Dept. 1: Physics / Electrical Engineering
Otto-Hahn-Allee, Build. NW 1, Room N 2160
D-28359 Bremen, Germany