[mems-talk] BCB cure

[Trent Huang]

Cassie,

What's the substrate and surface films you have underneath the BCB?

Did the BCB change color after the curing process?  There're many 
different thermal procedures for the polymer.  What's the EXACT 
application baking/curing procedure you used?  (spin rate, softbake, 
exposure/development?, stop points, ramping rates, end point, cooling 
rate, etc.)

Trent

Cassie Iany wrote:
> Hello, 
>  
> I am using BCB (dow chemical) 4024-26, after curing in N2 oven, the surface has very large bubbles which makes the surface looks ugly. Has anybody encoutered the same problem? Any solution for it?