[mems-talk] Anneal recipe for Pt thin film on Si wafer
Oliver Horn
o.horn at tuhh.de
Mon Mar 3 04:38:08 EST 2008
Hello Natsuki,
you will get PtSi or PtSi2 if you heat up Pt on Si without diffusion
barrier, even at 260°C. The adhesion is only a bit improved.
Oliver
More information about the MEMS-talk
mailing list