[mems-talk] Anneal recipe for Pt thin film on Si wafer

[Michael D Martin]

I've had this problem in the past, i.e. formation of Pt-Si alloys during an anneal with (I think) a Cr adhesion layer.  Could anyone recommend a material stack Pt/ adhesion layer/ diffusion barrier?  

Thanks, 
   Michael 
   U. of Louisville 

>>> Oliver Horn <o.horn at tuhh.de> 3/3/2008 4:38 AM >>>
Hello Natsuki,

you will get PtSi or PtSi2 if you heat up Pt on Si without diffusion 
barrier, even at 260&#176;C.  The adhesion is only a bit improved.

Oliver