[mems-talk] Titanium etch

Brent Garber garber at engr.uconn.edu
Fri Mar 7 12:39:13 EST 2008


Mike,

H2O2 @ 50c

Brent

Michael Cooke wrote:
> Dear all,
>
> I was wondering if there is a safer etch for Titanium which I haven't
> come across which doesn't involve HF or HF as a biproduct. Ideally it
> should be done at room temp.
>


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