[mems-talk] Titanium etch

[Deepasree Konduparthi]

TFTN is a HCl based etchant from transene

On Fri, Mar 7, 2008 at 12:39 PM, Brent Garber <garber at engr.uconn.edu> wrote:
> Mike,
>
>  H2O2 @ 50c
>
>  Brent
>
>
>  Michael Cooke wrote:
>  > Dear all,
>  >
>  > I was wondering if there is a safer etch for Titanium which I haven't
>  > come across which doesn't involve HF or HF as a biproduct. Ideally it
>  > should be done at room temp.