[mems-talk] fialed in borofloat-si bonding?

[Shay Kaplan]

If the Polarity is reversed there will still be current flowing as the ions
migrate in the glass but no bonding will occur.
Shay 

-----Original Message-----
From: mems-talk-bounces at memsnet.org [mailto:mems-talk-bounces at memsnet.org]
On Behalf Of Brubaker Chad
Sent: Tuesday, March 11, 2008 12:21 AM
To: General MEMS discussion
Cc: Brubaker Chad
Subject: RE: [mems-talk] fialed in borofloat-si bonding?

As others have commented, the reason for no bonding is no current.  This can
be due to three possible causes:

1 - Too much resistance in the stack - thick oxide is the most likely
reason.

2 - Open circuit - make sure that your potential source is actually in
direct contact with your stack.

3 - proper polarity - make sure that you are net negative potiential to the
glass - easiest way is to have the silicon attached to a ground, and apply a
negative potential to the glass.

What kind of bonding system (if any) are you using? This may be something as
simple as an electrode out of position.

Best Regards,
Chad Brubaker