[mems-talk] Sawtooth Deposition Profile?

[Aaron Datesman]

Dear List Members,

I would like to sputter deposit a metallic film to have a "sawtooth" 
thickness profile, shown below:


   /|        /|        /|
  / |       / |       / |
 /  |___/  |___/  |___ etc.

The desired film height is ~100 nm and the width of each feature is ~500 
nm.  Can anyone suggest a suitable method to accomplish this?

Regards,

Dr. Aaron Datesman
Materials Science Division
Argonne National Laboratory
9700 S. Cass Avenue
Argonne, IL 60439

(ph) 630-252-9154
(fax) 630-252-9595
datesman at anl.gov