[mems-talk] wet etch of LPCVD amorphous Silicon

Haixin Zhu Haixin.Zhu at asu.edu
Wed Mar 12 17:12:26 EST 2008

Previous message: [mems-talk] Sawtooth Deposition Profile?
Next message: [mems-talk] wet etch of LPCVD amorphous Silicon
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Dear all,

I am looking for the wet etchant for LPCVD a-Si, anyone has suggestion?

Thanks

Michael

Previous message: [mems-talk] Sawtooth Deposition Profile?
Next message: [mems-talk] wet etch of LPCVD amorphous Silicon
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the MEMS-talk mailing list