[mems-talk] wet etch of LPCVD amorphous Silicon

[Kvel Bergtatt]

any quaternary amine at high T (60-80C) should work.

On Wed, Mar 12, 2008 at 3:12 PM, Haixin Zhu <Haixin.Zhu at asu.edu> wrote:

> Dear all,
>
> I am looking for the wet etchant for LPCVD a-Si, anyone has suggestion?
>
> Thanks
>
> Michael
-- 
_v