[mems-talk] Isotropic / anisotropic polymer etch

[Hakemi, Ghazal]

Dear all,
 
Does anybody know how polymer etches  (isotropic or anisotropic) in:

1.	
	Oxygen-based RIE 
2.	
	KOH (potassium hydroxide)

Any details are appreciated.

Regards,

Miss Ghazal Hakemi
PhD Student 
Microsystems and Nanotechnology Centre (Building 70)
Cranfield University
MK43 0AL
tel. 01234 750111 x2583
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