[mems-talk] wire bonding to chromium pads

prabhu arumugam auprabhu at yahoo.com
Fri Mar 14 11:01:28 EST 2008


hello all,

i want to wire bond to chromium pads (ebeam
evaporated, 200 nm thick,1 mm x 1mm). The chromium was
exposed to BOE during the fabrication process. I would
like to know the wire material, process conditions and
equipment details.

Any help is appreciated.

Thanks
prabhu


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