[mems-talk] Ti etching?

[Ferda Mravenec]

Hello all,

I am solving a problem with masking of the boro-silicate and soda-lime glass samples. I need a Ti mask on the glass with straight lines without Ti layer. The straight lines are from 1 to 3 um (widths of the mask opening ). One chance is make Lift off procedure but I think it could be done by simpler way. 

 I would like to make 100-200 nm Ti layer on the glass surface (i.e. BK7...), than I coat a photoresist (i.e. SU8), develop and do anisotropic etching of the titanium layer. I have found some solutions like H2O2, HF, KOH which are suitable for Ti layer etching but HF is dangerous and also I afraid about undercutting and glass surface damage. 
Does anyone know some suitable recipe for this work?

Thanks a lot for any suggestion.

Ferda Mravenec