[mems-talk] Ti etching?
basar bolukbas
basarbolukbas at hotmail.com
Tue Mar 18 10:29:50 EST 2008
Hello Ferda..
You can use HF:H2O2:DIWater (1:1:20) for Ti wet etching.
Within 15 seconds nearly 500A Ti layer will be etch...
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