[mems-talk] removing sticky adhesive

[Kagan Topalli]

O2 plasma removes the sticky glues of cellotapes.
Regards,

Kagan TOPALLI, Ph. D.
Senior Research Engineer
MEMS-VLSI and EMT Group
Middle East Technical University
Dept. of Electrical & Electronics Eng.
TR-06531 Ankara Turkey
Phone: +90 312 210 44 09 or +90 312 210 23 40
Fax: +90 312 210 23 04
http://www.mems.eee.metu.edu.tr/~topalli/
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Olgierd Cybulski wrote:
>>  is there a way to remove sticky adhesive, which is left over after a
>>  cellotape is removed. we are using cello tape for masking while etching
>>  SiN, and when cellotape is peeled of the sticky glue is left over. Is there
>>  a better way to remove it with out scrubbing?
>>     
>
> It depends on the type of glue.  Try IPA, extraction naphtha or benzine.
> Sometimes acetone is enough.