[mems-talk] PECVD oxide conductivity

[Ho Yin Chan]

Hi all,

  I am putting Ti/Au metal lines on top of 1um PECVD oxide at ~380C. I found
there is finite reisstance between the metal lines. Those are parallel lines
with 100um wide and 2mm long. They are seperated at a distance of 40um. I am
curious the reason behind it. I tried to measure the resistivity of PECVD
oxide. It shows > 10E14 Ohm cm.

 Thank you.

-- HY