[mems-talk] Pyrex ebeam evaporation

[Daniel Fine]

Hello,

  My name is Daniel Fine and I am a post doc at the University of Texas at Austin.  I am trying to ebeam evaporate Pyrex (7740) and am running into a problem where I am finding it hard to prevent bubbling and thus spitting of the material when I try to achieve deposition rates of 5 Angstrom per second or higher.  The films are therefore covered with non-uniform streaks of Pyrex.  I am using a CHA evaporator.  I have tried a steady beam spot in one place and an oscillating beam spot as well but get the same problem of large bubble formation.  I would greatly appreciate any input concerning how I might over come this problem.

Thanks,
  Daniel Fine