[mems-talk] Gold evaporation coating on silicon.

[Shay Kaplan]

Moshe

Can you use an adhesion layer? Ti or Cr without breaking the vacuum between
the two layers? If not, it's tough. You will have to either evaporate with
very high substrate temperature or roughen the surface.

Shay

-----Original Message-----
From: mems-talk-bounces at memsnet.org [mailto:mems-talk-bounces at memsnet.org]
On Behalf Of Moshe
Sent: Thursday, May 01, 2008 7:14 AM
To: mems-talk at memsnet.org
Subject: [mems-talk] Gold evaporation coating on silicon.

Hello

I want to coat silicon with evaporation coating, and to assurance that the
adhesion between the two materials  will be optimal.
What will be  the optimal treatment to achieve adhesion ?