[mems-talk] Gold evaporation coating on silicon.

[Kevin Paul Nichols]

Moshe,

In addition to Cr (as mentioned in other emails), Ta and Ti also work as
adhesion layers for Au on Si.

Kevin Paul Nichols
MESA+ Institute for Nanotechnology
Mesoscale Chemical Systems
Meander 151
University of Twente
Postbus 217
7500 AE Enschede
The Netherlands

Office: +31 (0)53 489 26 31
Mobile: +31 (0)6 49 312 471
Fax   : +31 (0)53 489 35 95
Email : k.p.nichols at utwente.nl
Web   : http://mcs.tnw.utwente.nl/


> From: Moshe <moduli0621 at yahoo.com>
> Reply-To: General MEMS discussion <mems-talk at memsnet.org>
> Date: Wed, 30 Apr 2008 22:14:14 -0700 (PDT)
> To: <mems-talk at memsnet.org>
> Subject: [mems-talk] Gold evaporation coating on silicon.
> 
> Hello
> 
> I want to coat silicon with evaporation coating, and
> to assurance that the adhesion between the two
> materials  will be optimal.
> What will be  the optimal treatment to achieve
> adhesion ?