[mems-talk] Where to buy Phosphorus solid diffusion source, such as P2O5?

Dave Goldstein d.goldstein.2007 at gmail.com
Fri May 2 09:51:11 EDT 2008

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I would like to buy phosphorus solid diffusion source for silicon
diffusion process. The literature mention that P2O5 wafers are
available but I couldn't locate them. Thanks for any suggestions.

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