[mems-talk] PMMA as a mask for RIE-SixNx

Nagare Gajanan Nagare nagaregd at ee.iitb.ac.in
Sun May 4 15:24:26 EDT 2008

Previous message: [mems-talk] Wet chemical etch for 316L stainless steel
Next message: [mems-talk] R: PMMA as a mask for RIE-SixNx
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

What should be the tretament for PMMA to use it as a mask for RIE of SixNx
with CHF3 and CF4 gass.


Nagare Gajanan D

Previous message: [mems-talk] Wet chemical etch for 316L stainless steel
Next message: [mems-talk] R: PMMA as a mask for RIE-SixNx
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the MEMS-talk mailing list