[mems-talk] Microfab book for undergrad
Anna Torrents Cabestany
torrenta at uci.edu
Wed May 7 16:08:56 EDT 2008
I think this book will help you.
"Fundamentals of Microfabrication" by M. Madou
Anna
Jose Guevarra wrote:
> Hi,
>
> I'm an undergrad whose getting serious about microfab. I have two
> books (one is science and engineering of microelectronic fab by
> cambell)
> but I don't think either is geared toward entry level/ undergrad level
> students. Can anyone recommend a good book with lot's of worked out
> examples and clear
> explanations of material concepts?
>
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