[mems-talk] Microfab book for undergrad

Nicolas Duarte nbd110 at psu.edu
Thu May 8 09:08:40 EDT 2008


The Madou book is fantastic and a very in depth source for  
information.  It is hard for me to judge now though if it would have  
been hard for me to read it as an undergrad though.

When I was in undergrad I started with "Micromachined Transducers  
Sourcebook" by Gregory Kovacs and it is what really got me hooked on  
MEMS.  It has a great overview of everything without going too quickly  
into the details.  Kovacs and Madou are a great couple of books.

Nicolas Duarte
Ph.D. Candidate at Penn State University


On May 7, 2008, at 2:43 PM, Jose Guevarra wrote:

> Hi,
>
> I'm an undergrad whose getting serious about microfab.  I have two
> books (one is science and engineering of microelectronic fab by
> cambell)
> but I don't think either is geared toward entry level/ undergrad level
> students.  Can anyone recommend a good book with lot's of worked out
> examples and clear
> explanations of material concepts?


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