[mems-talk] Isopropanol vs Pyrex

[Stefano Meliga]

Hi everybody,
I'm performing lift off to pattern SiO2 on a gold thin film on Pyrex 
substrate.

My process will be:
Remover 1165 bath (overnight)
Remover 1165 bath + ultrasounds (some minutes?)
Isopropanol bath? (how long?)
2 Rinses
Spin Rinser Dryer

Do you agree?
Do you think I should do the isopropanol bath? for how long? If I well 
remember ISP breaks PMMA... what about pyrex (glass)?

Thanks a lot,
SM.