[mems-talk] Material for capping a SU8-2050 Microfluidic Opto-BioChip

seyeda at ualberta.ca seyeda at ualberta.ca
Fri May 9 16:09:43 EDT 2008


Hi all,

I have made a microfluidic Opto-Biochip in SU8 2050 on a glass substrate.
Now I need to cap this with another optically clear material such as  
glass, PDMS, PMMA or any other material that may do the job. Up to now  
we haven't had success in bonding any of these materials to SU8 after  
post exposure bake. Does anybody know a material and the process that  
may work as a cap for SU8 chip.

Suggestions are greatly appreciated.

Thanks

Seyed


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