[mems-talk] erode the surface of the silicon, glass or SU-8 surface

Zhao Lu zhao.lu at polymtl.ca
Fri May 9 17:13:12 EDT 2008


Hello,

     In my project, I need to increase the surface roughness of silicon, glass
substrate or SU8. The surface roughness should be around 1 to 2um. Any
suggestion will be hightly appreciated.

     Many Thanks

     Zhao


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