[mems-talk] Gold evaporation coating on silicon - thermal treatment for adhesion

Moshe moduli0621 at yahoo.com
Sat May 10 14:41:07 EDT 2008


Last week I asked about an adhesion coating achieved
between gold and silicon.

Since then I've heard about a  different way to achieve that.

I talked about thermal treatment so the gold coating
absorb to the silicon, at that way the adhesion obtain
with no third layer.

The general thermal treatment recipe is heating to 400
Celsius degrees for few hours in inert environment.   
Has anyone done that before?

Whet is the exact recipe for this treatment ?

Thank you



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