[mems-talk] Material for capping a SU8-2050 Microfluidic Opto-BioChip

eowin rohan secret.lore at yahoo.se
Mon May 12 10:38:42 EDT 2008


Hi, 

Garret is right, an UV adhesive should work fine, but
you could even try with a new SU-8 layer: spin coat
SU-8 on the substrate cap (glass, PC,...), do the soft
bake and put the cap over your device with the SU-8
layer in contact with your device, expose it to UV and
finally do the hard bake again, you will get a nice
transparent cap.

I hope it helps

Eowin

> -----Original Message-----
> From: seyeda at ualberta.ca [mailto:seyeda at ualberta.ca]
> 
> Sent: Friday, May 09, 2008 1:10 PM
> To: General MEMS discussion
> Subject: [mems-talk] Material for capping a SU8-2050
> Microfluidic
> Opto-BioChip
> 
> Hi all,
> 
> I have made a microfluidic Opto-Biochip in SU8 2050
> on a glass
> substrate.
> Now I need to cap this with another optically clear
> material such as  
> glass, PDMS, PMMA or any other material that may do
> the job. Up to now  
> we haven't had success in bonding any of these
> materials to SU8 after  
> post exposure bake. Does anybody know a material and
> the process that  
> may work as a cap for SU8 chip.


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