[mems-talk] Young Modulus and Poisson Ratio of TiW

[Kim Anh Bui]

Dear all,

I measure the internal stress of TiW membrane by XRD and I need its poisson ratio. I search some database on internet that around 0.28. Is it a good value? And could you please give me the Young Modulus of TiW too.

We used TiW (10% . 90%) sputtering method. It is said that after sputtering, the actual concentration of Ti in the membrane will be less than 10%. Then need I measure the Young Modulus and the poisson ratio of the membrane after deposition?

Thank you very much.
Anna.

Kim-Anh BUI-THI

Stagiaire de Thalès Recherche et Technologie
91767 - Palaiseau Cedex